Multimedia Available: Applied Materials Revolutionizes Defect Review with Industry's First Automated In-Line SEM/FIB System
--(BUSINESS WIRE)--
Applied Materials Inc. launches its revolutionary Applied SEMVision G2 FIB Defect Analysis system, the first in-line production tool to integrate advanced defect review SEM(a) capability with automated FIB (focused ion beam) cross-sectioning and EDX(b) analysis technology in one system. With its patented ClearCut(TM) one-stop review and analysis solution, chipmakers can now perform high-speed, high-resolution automatic SEM review followed by FIB analysis of defects in minutes as part of their in-line review scheme.
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(a) SEM: scanning electron microscope
(b) EDX: Energy Dispersive X-Ray
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SOURCE: Newstream and Applied Materials