Motorola Orders Multiple Mirra Mesa CMP Systems from Applied Materials for Copper, Dielectric, Tungsten Applications
SANTA CLARA, Calif.--(BUSINESS WIRE)--March 16, 2000--
Mirra Mesa(TM) Integrated CMP and Cleaner Systems Provide High
Process Performance, Improve Fab Efficiency
Applied Materials, Inc. today announced that Motorola's Semiconductor Products Sector has ordered several Mirra Mesa CMP (chemical mechanical polishing) systems for planarizing copper, silicon dioxide and tungsten films on its advanced semiconductor devices.
Shipments of the integrated CMP and cleaning systems will begin in March to Motorola's MOS 12 facility in Chandler, Arizona; terms of the sale were not disclosed.
Chris Belden, vice president, Die Manufacturing, Motorola, said, "Motorola's large installed base of Mirra(R) systems has performed well over a range of applications. They will continue to play a critical role as we ramp our expanded MOS 12 facility to its full capacity. The Mirra system is vital to a number of key operations, including our state-of-the-art copper process.
"By integrating the cleaner with the polishing tool, the Mirra Mesa system contributes to overall factory efficiency through improved wafer handling and defect reduction."
The Mirra Mesa system combines state-of-the-art wafer polishing and cleaning capabilities on a single system to deliver the industry's highest wafer throughput per square foot. For excellent process performance and throughput, the Mirra Mesa system features a three-platen architecture, Titan Head(TM) polishers, precise endpoint detection technology and an integrated cleaner utilizing edge grip wafer transfer. To provide maximum cleaning efficiency, the Mirra Mesa system includes a single-wafer immersion megasonic bath.
"Motorola's choice to use the Mirra Mesa system for all three interconnect CMP applications underscores the system's exceptional technical capabilities," noted Chris Smith, vice president and general manager of Applied Materials' CMP product group. "We value the long term relationship we've had with Motorola in providing leading-edge CMP technology and look forward to continue supporting the company with Mirra Mesa systems."
According to market research firm Dataquest, the market for CMP systems was estimated to be $1.04 billion in 1999 and is expected to grow to $2.5 billion by the year 2004, making it one of the strongest growing segments of the semiconductor equipment market.
Applied Materials, Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials is traded on the Nasdaq National Market System under the symbol "AMAT." Applied Materials' web site is www.appliedmaterials.com.
CONTACT: Applied Materials, Inc.
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