Fujitsu Purchases Applied Materials' Ultima HDP-CVD Centura Systems for Production at Multiple Fabs Worldwide
Market-Leading Ultima HDP-CVD Systems Ordered for
Production of Advanced Devices
Applied Materials, Inc. announced today that Fujitsu Limited, one of the world's largest manufacturers of semiconductor chips, has ordered multiple Ultima HDP-CVD(TM) (high density plasma-chemical vapor deposition) Centura(R) systems for high-volume production applications at Fujitsu fabs worldwide. The systems, expected to be shipped during Applied Materials' second fiscal quarter, will be used to deposit critical dielectric films in Fujitsu's most advanced devices.
"Fujitsu ranks as one of the top semiconductor manufacturers, both in technology and fab operations, so we are pleased that the Ultima has been qualified for volume production of its next-generation chips. The system has been selected as tool of record for HDP-CVD applications because of its excellent productivity and process capability," said Dr. Farhad Moghadam, vice president, general manager of Applied Materials' Dielectric Deposition Division. "The Ultima HDP-CVD Centura offers a wide range of technical and economic advantages that contribute to the success of next-generation devices."
The Ultima system was introduced in November 1996 and has gained acceptance as the industry's leading HDP-CVD system. The Ultima is being used by semiconductor manufacturers for a variety of dielectric CVD gap-fill applications, including shallow trench isolation (STI) and intermetal dielectrics (IMD) for sub-0.25 micron generation devices. In addition, the Ultima is the only system currently being used in production to deposit FSG reduced dielectric constant (low k) films. The Ultima features Applied Materials' revolutionary Remote Plasma Clean technology which emits virtually no global warming gases, eliminating the need for exhaust scrubbers.
Applied Materials, Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials is traded on the Nasdaq National Market System under the symbol "AMAT." Applied Materials' web site is www.appliedmaterials.com.