News Release

Epitronics and Applied Materials Cooperate to Provide Customers with Enhanced SiGe Capability

Mar 8, 1999 at 12:00 AM EST
SANTA CLARA, Calif.--(BUSINESS WIRE)--March 8, 1999--

Companies Team to Demonstrate Silicon Germanium (SiGe) Epitaxial
Processes to Chipmakers Using Applied Materials' Epi Centura(R)
System in a Production Environment

Applied Materials, Inc. today announced that it is working with Epitronics Corp., a leading supplier of specialty epitaxial (epi) services to the semiconductor industry. The collaboration will provide customers with a qualified facility in Mesa, Arizona, for demonstrating and developing silicon germanium (SiGe) epitaxial processes on Applied Materials' Epi Centura system.

Silicon germanium epi is a key material technology that enables high-speed digital applications such as wireless telecommunications. Used in the formation of heterojunction bipolar transistors (HBTs), it can enable devices with higher operational frequencies, lower noise and lower power consumption.

Grant Imper, general manager of Applied Materials' Epi Division, said, "The emergence of SiGe epi technology provides us with an opportunity to help our customers develop production-ready epi processes for a variety of applications. Cooperating with Epitronics, the recognized leader in high quality epi services, expands our customers' ability to develop these processes using the high-productivity Epi Centura system in a true production environment."

As part of the collaboration, chipmakers can use the Epi Centura systems at Epitronics' facility for process demonstration and development under the guidance of Applied Materials and Epitronics technologists. The goal of this "virtual fab" is to provide cost-effective, enhanced service and information to both companies and their customers. For smaller chipmakers who cannot support an internal epi facility, the cooperative arrangement lets them access SiGe epi technology using the most advanced process equipment. Epitronics also will use the Epi Centura system to manufacture SiGe epi wafers for customers.

Duncan Brown, Epitronics' president said, "The Epi Centura offers a production-proven epi solution for both mainstream silicon epi and advanced SiGe technology. Having an epi service for SiGe and other types of wafers will permit chipmakers to begin development of advanced circuits with less investment in epi equipment and technology, providing an efficient pathway from development to production. This exciting opportunity furthers our efforts in the SiGe market by incorporating new technology and additional equipment for our epitaxial services."

Epitronics Corp., headquartered in Mesa, Arizona, is the specialty semiconductor epitaxial services business of ATMI, Inc. Epitronics' Silicon Division provides epitaxial services including single and multiple layers, growth on buried layers, patterned substrates, and advanced device structures on wafers up to 200mm diameter. ATMI (Nasdaq:ATMI) provides products and services for semiconductor manufacture, including thin film materials and delivery systems, environmental equipment, sub-atmospheric gas delivery systems and high-purity materials packaging systems.

Applied Materials, Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials is traded on the Nasdaq National Market System under the symbol, "AMAT." Applied Materials' web site is www.AppliedMaterials.com.