Chartered Selects Applied Materials' Advanced Transistor, Low k Interconnect and Inspection Technologies for 300mm Fab
SANTA CLARA, Calif.--(BUSINESS WIRE)--March 25, 2004--Applied Materials, Inc. (Nasdaq:AMAT) has received an order from Chartered Semiconductor Manufacturing (Nasdaq: CHRT and SGX-ST: Chartered), one of the world's top three dedicated semiconductor foundries, for a broad range of transistor, low k interconnect and inspection systems. These Applied Materials systems will be used to manufacture 130nm and 90nm devices at Chartered's first 300mm facility, Fab 7, in Singapore.
Kay Chai "KC" Ang, Chartered's senior vice president of fab operations, said, "Chartered's transition to next-generation 300mm manufacturing needs to be supported by the most advanced equipment to achieve high productivity. We selected Applied Materials' systems because of their capabilities in supporting customers' complex designs targeting copper/low k interconnect technology implementation."
Chartered's order included multiple CMP (Chemical Mechanical Polishing), PVD (physical vapor deposition), dielectric and tungsten CVD (chemical vapor deposition) systems, and transistor fabrication technologies such as RTP and DPN (decoupled plasma nitridation) systems, as well as wafer inspection, CD-SEM (critical dimension scanning electron microscope) metrology and defect analysis systems. All of the systems are capable of processing the most advanced copper/low k devices to the 90nm technology node and beyond.
Franz Janker, senior vice president of Applied Materials, said, "This order for many of our most advanced systems represents the continuation of our close relationship with Chartered, plus our focus on cost-effective and high-productivity system designs. We are pleased to participate in their success as they move to next-generation technology production."
Applied Materials, Inc. (Nasdaq:AMAT) is the largest supplier of equipment and services to the global semiconductor industry. Applied Materials' web site is www.appliedmaterials.com.
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SOURCE: Applied Materials, Inc.