Applied Materials and QualiTau Begin Copper Interconnect Reliability Testing Program in EPIC Facility
SANTA CLARA, Calif.--(BUSINESS WIRE)--June 15, 2000--
Joint Program to Enhance Process Module Development at Applied
Materials' Equipment and Process Integration Center (EPIC)
Applied Materials, Inc. has begun a joint program with QualiTau, Inc., the leading supplier of reliability test equipment to the semiconductor industry, to test electromigration structures in advanced chip interconnects formed with copper and low (kappa) dielectric materials.
The testing, which will be performed using QualiTau's equipment, will assist Applied Materials in providing customers reliable, integrated Process Module(TM) solutions for their next-generation chip manufacturing requirements.
Electromigration, which causes the formation of voids and eventual separation of circuit lines, can result in chip failure. To support this testing program, Applied Materials has ordered multiple QualiTau Modular Integrated Reliability Analyzer systems with electromigration testing capability to 350 (degree) C. The first QualiTau system is already installed and in use at Applied Materials' EPIC facility in Santa Clara, Calif.
"We expect QualiTau's expertise in electromigration testing systems to enhance our ability to test the reliability of copper and low (kappa) interconnects as part of the development and characterization of our Process Module products," said Dennis Yost, managing director of Applied Materials' EPIC facility. "With this key data, our customers should be better prepared to move forward into large-scale copper process implementation using Applied Materials' integrated technologies."
Applied Materials' EPIC facility contains all of the equipment and processes needed for customers to develop and test a completely integrated multi-level metal copper interconnect process before installing it in their fab. In addition to individual process technologies, the company's Process Module products are being characterized at the facility for overall defect levels, operating cost, productivity and final electrical performance of completed test structures.
QualiTau is the world's leading provider of reliability test equipment, with an installed base and services covering the global semiconductor industry. QualiTau has major facilities in the Silicon Valley and Israel, with sales offices and representatives all over the world. QualiTau's web site is www.qualitau.com.
Applied Materials, Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials is traded on the Nasdaq National Market System under the symbol, "AMAT." Applied Materials' web site is www.appliedmaterials.com.
CONTACT: Applied Materials Inc., Santa Clara
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