AKT Introduces AKT-25K PECVD System for Manufacturing Next Generation Flat Panel Displays
Generation-6 PECVD System Enables Expanded Production of Large-Size Flat Panel TVs
SANTA CLARA, Calif.--(BUSINESS WIRE)--Jan. 8, 2003-- AKT, Inc., an Applied Materials company and the world's leading supplier of plasma enhanced chemical vapor deposition (PECVD) systems to the flat panel display (FPD) industry, announces its AKT-25K PECVD system for manufacturing generation-6 TFT-LCD* panels. Generation-6 substrates, which measure 1500mm x 1800mm and have 75 percent more area than the previous generation, are used to make TFT-LCD displays for flat panel televisions. Production shipments of the AKT-25K system are expected to begin in mid-calendar year 2003.
"Flat panel computer and TV screens are expected to dominate the market as they become increasingly affordable. As our customers move to manufacturing larger, more cost-effective substrates to meet this demand, we have led the way in providing the productivity and advanced technology to enable their aggressive timelines," noted Dr. Kam Law, corporate vice president and general manager of AKT. "We have already received orders for this new system, which is based on the proven system architecture and technology that have made us the industry leader in CVD equipment."
The AKT-25K PECVD system builds on many of the proven technology advances of the previous AKT-15K PECVD system. The AKT-25K PECVD has capacity for up to five process chambers and maintains a high throughput of greater than 50 substrates per hour. The system can deposit single layers or in situ multiple-layer films of amorphous silicon (a-Si), silicon oxide (SiOx), silicon oxynitride (SiON) and silicon nitride (SiNx).
According to DisplaySearch, a market research firm, the market for TFT-LCD display manufacturing equipment was $4.6 billion in 2001 and is expected to reach $6.8 billion by 2004. DisplaySearch ranked AKT as the global leader in CVD equipment for flat panel display manufacturing in 2001.
Applied Materials, the largest supplier of products and services to the global semiconductor industry, is one of the world's leading information infrastructure providers. Applied Materials enables Information for Everyone(TM) by helping semiconductor manufacturers produce more powerful, portable and affordable chips. Applied Materials' web site is www.appliedmaterials.com.
*TFT-LCD: thin film transistor liquid crystal display
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